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EX5IN INDUSTRIAL LASER
SPECIFICATIONS
|
PARAMETER |
F2 |
ArF |
KrF |
XeCl |
XeF |
| Wavelength nm |
157 |
193 |
248 |
308 |
351 |
| Energy Max.
mJ |
1.5 |
12 |
20 |
7 |
5 |
| Average Power @250Hz |
0.5 |
2.4 |
4 |
5 |
5 |
| Average Power @500Hz |
1 |
4 |
8 |
9 |
9 |
| Average
Power @750Hz |
1.5 |
5 |
10 |
12 |
12 |
| Repetition
Rate, Hz |
250/500 |
| Dynamic gas lifetime to
50% energy |
10E6 |
20E6 |
35E6 |
20E6 |
20E6 |
| Shelf life
Approx. to 50% energy |
15 days |
90 days |
120 days |
>6 months |
120 Days |
| Pulse Length,
ns |
8 |
| Beam Size, mm |
3 X 6 |
| Stability |
<2% Standard Deviation |
| Tube Service |
2 Billion Pulses |
| Divergence, mRad full angle |
1 X
2 |
| Cooling |
Air/Water |
| Window Service |
1000E6 |
1000E6 |
1000E6 |
200E6 |
300E6 |
EX5IN Dimensions
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