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EX5 ULTRA-MINI EXCIMER LASER
2W of deep UV (193nm) in 35Lx25Hx16W cm, <10kg
THE SMALL AND LIGHTWEIGHT EXCIMER LASER FOR DRONE AND SMALL SYSTEM APPLICATION
EX5 Ultra-Mini Specifications
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PARAMETER |
F2 |
ArF |
KrF |
XeCl |
XeF |
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Wavelength nm |
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193 |
248 |
308 |
351 |
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Energy Max. mJ |
|
8 |
12 |
8 |
5 |
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Average Power W @ 250Hz |
|
2 |
3 |
2 |
1.25 |
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Repetition rate Hz |
250 |
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Dynamic gas lifetime Pulses to 50% energy |
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12E6 |
18E6 |
12E6 |
12E6 |
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Shelf life to 50% energy |
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15 days |
30 days |
15 days |
15 days |
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Pulse Length nS |
7--9 |
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Stability |
<2% Standard Deviation |
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Tube Service |
2 Billion Pulses |
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Beam Size, mm |
2.5 X 4 |
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Divergence, mRad full angle |
1 X 2 |
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Cooling |
Air standard |
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Timing Jitter |
2nS Standard Deviation |
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Weight |
<10 kg |
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Dimensions, inches |
12L x 9H x 6W |
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AC Input |
120 V 5Amp / 220 V 2.5Amp |
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GAMLASER.COM
