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EX5 ULTRA-MINI EXCIMER LASER

2W of deep UV (193nm) in 35Lx25Hx16W cm, <10kg

THE SMALL AND LIGHTWEIGHT DRONEABLE EXCIMER LASER

 


EX5 Ultra-Mini Specifications

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm
193 248 308 351
Energy Max. mJ
8 12 8 5
Average Power W @ 250Hz
2 3 2 1.25
Repetition rate Hz 250
Dynamic gas lifetime Pulses to 50% energy
12E6 18E6 12E6 12E6
Shelf life to 50% energy
15 days 30 days    15    days  15    days
Pulse Length nS 7--9
Stability <2% Standard Deviation
Tube Service 2 Billion Pulses
Beam Size, mm 2.5 X 4
Divergence, mRad full angle 1 X 2
Cooling Air standard
Timing Jitter 2nS Standard Deviation
Weight <10 kg
Dimensions, inches 12L x 9H x 6W
AC Input  120 V 5Amp / 220 V 2.5Amp