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EX5 MINI EXCIMER LASER

6W of deep UV (193nm) in 1.4 cubic feet, 15kg

THE ONLY MINI EXCIMER THAT REALLY IS SMALL AND LIGHT WEIGHT

 

ALSO THE EX5A Industrial version

 Billons of pulses system lifetime

kHz Operation

Low gas usage

Applications

bulletIonization source
bulletCompact OEM systems
bulletMicromachining
bulletRefractive Surgery
bulletRaman spectroscopy

The EX5 a genuine full function MINI excimer laser in an ultra compact 48 X 26 X 26cm, 15kg, air cooled package with up to 8.0W at 248nm and 4.0W at 193nm and up to 1000Hz repetition rate. The laser design features include an internal Faraday cage for ultra low electrical noise and all metal/ceramic construction

NEW .EX5D High power industrial mini laser

 

   

The EX5A is now available in 250Hz, 500Hz and 1000Hz versions. The EX5A SUPER CHAMBER produces higher average power output with longer gas lifetime.  F2 operation in the VUV is also standard with up to 1W output power. A new broadband optics set allows operation from 157nm to 351nm with full specifications simply by changing the gas.

Highlights

bullet2 year warranty
bulletLight, compact and easily portable
bulletLong system lifetime Billions of pulses for Industrial installations
bullet15kg,
bulletMini excimer in a single  package
bulletInternal vacuum pump and halogen filter
bulletComputer controlled
bulletUltra Low trigger jitter
bulletHigh reliability state of the art, long life laser chamber
bulletExcellent pulse to pulse stability
bulletVery long shelf life
bulletEX5A/1000 NEW 20000Hz version
bulletThe latest in materials science EX5A SUPER CHAMBER
bulletHigh duty cycle Industrial version
bullet20mJ TEM00 C02 TEA Version

EX5 Specifications

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 1.5/2.0* 12 20 8 6
Peak Power MW 0.25 1.75 2.5 1.0 0.75
Average Power @ 250Hz 0.3/0.4 2.5 4.0 1.5 1.3
Average Power @ 500Hz 0.5 5.0 8.0 2.5 2.4
Repetition rate 250/500/750
Dynamic gas lifetime Pulses to 50% energy 10E6 12E6 18E6 20E6 15E6
Shelf life to 50% energy 10 days 15 days 30 days 2 Months 30 Days
Pulse Length nS    7--9
Stability <2% Standard Deviation
Tube Service 2 Billion Pulses
Beam Size, mm 3X 6
Divergence, mRad full angle 1 X 2
Cooling Air standard/Optional Water
Timing Jitter 2nS Standard Deviation
Weight 15kg 250/500Hz

*2mJ for F2 optimized version.

 

Laser performance

 

EX5A Industrial MINI LASER SYSTEM

Years of operation Billions of pulses

The EX5A offers high performance in a compact mini excimer laser. System lifetime is greatly extended, energy output and average power levels are higher than the standard EX5 unit.

The EX5A is recommended for industrial and rough service applications where high duty cycle and  minimal maintenance is required.

Repetition rates to 2000Hz 2   year warranty

EX5A/1000/2000

 

EX5A Specifications

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 1.5/2.5* 15 20 12 8
Peak Power MW 0.30 2.0 2.5 1.25 0.8
Average Power @ 250Hz 0.3/0.4 3.0 5.0 2.5 1.4
Average Power @ 500Hz 0.5 6.0 8.0 4.0 2.5
Average Power @ 1000Hz 1.0 10 15 6.0 5.0
Energy 2000 Hz Max. mJ   7 10  
Average power @ 2000Hz   10 15  
Dynamic gas lifetime Pulses to 50% energy 10E6 12E6 18E6 20E6 15E6
Shelf life to 50% energy 10 days 15 days 30 days >2 Months 30 Days
Pulse Length nS 8-10
Stability <2% Standard Deviation
Tube Service 5 Billion  of Pulses
Beam Size, mm 3X 6
Divergence, mRad full angle 1 X 2
Cooling Air/Water
Timing Jitter 2nS Standard Deviation
Weight 15kg 250/500Hz,  35kg 1000/2000Hz

 

Laser performance data

40  MILLION PULSES ON A SINGLE GAS FILL NO GAS INJECTIONS

 

 

*2.5mJ for F2 optimized version.

Download EX5 Data sheet in .pdf format

EX5 Dimensional drawing

EX5 Beam Profile