Home Up News Laboratory Excimer lasers Information Request Technology OEM Lasers Line Narrowed Excimers CO2 Lasers Semiconductor Excimers Contact Employment  

                                        

 

 

 

 

EX50IN INDUSTRIAL LASER

 

SPECIFICATIONS

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 2.5 35 50 20 20
Average Power @250Hz 0.5 5 10 5 5
Average Power @500Hz 1 10 20 9 9
Average Power @750Hz 1.5 15 28 12 12
Repetition Rate, Hz                250/500/750
Dynamic gas lifetime to 50% energy

10E6

20E6

30E6

15E6

150E6

Shelf life Approx. to 50% energy 15 days 90 days 120 days 180 days 120 Days
Pulse Length, ns 10 15-20
Beam Size, mm  9 X 4
Stability  <2% Standard Deviation
Tube Service 3 Billion Pulses
Divergence, mRad full angle 2 X 1
Cooling Air/Water
Window Service 500E6 500E6 >1 billion 200E6 300E6

       EX50IN Dimensions