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EX50 2000 Hz Version

The EX50/2000 is an ultra high repetition rate version of the EX50 laser. The laser  produces up to 60W with KrF at 248nm. The laser also offers longer gas lifetime than the standard EX50 product.

 

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 2.5 35 50 25 25
Average Power @500Hz 1 10 20 11 10
Average Power @1000Hz 2 17 35 17 16
Max. Average power @ 2kHz 3 32 60 32 30
Repetition Rate                               2000Hz
Dynamic gas lifetime Pulses to 50% energy

Industrial Version

20E6

40E6

40E6

100E6

60E6

500E6

60E6

100E6

70E6

400E6

Shelf life Approx. to 50% energy 15 days 90 days 120 days >1 Year 120 Days
Pulse Length 10                     17-20 nS
Beam Size                   9 X 45 mm
Stability <2% Standard Deviation@ 1kHz
Tube Service                     5 Billion Pulses
Divergence               .4 X .8 mRad
Cooling Water
Window Service 200E6 150E6 >1 billion 100E6 400E6

 

Key Benefits

bulletThe highest available repetition rate
bulletHigh Power in a single table top package
bulletHigh reliability long life laser chamber
bulletExcellent pulse to pulse stability
bullet1 Billion pulse optics service
bullet500 Million pulses without refill