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HIGHLY LINE NARROWED EXCIMER LASERS

 
The EX50LN 1pm highly line narrowed excimer laser

Applications

bulletSpectroscopy
bulletSemiconductor metrology
bulletOptical testing
bullet 
bullet    0.3pm, 10mJ MOPA output

Key Benefits

bulletNarrow line width in a single table top package
bulletHigh spectral intensity
bulletTunable deep UV source
bulletOptional Ultra Narrow, 0.5pm, 0.3pm and 0.08pm Line width
bulletAvailable MOPA line narrowed systems

Narrowband lasers use intra cavity wavelength dispersive elements to line narrow the free running spectral range of excimer lasers. Line widths of less than 1pm are routinely obtained in table top systems.

THE EX50LN HIGHLY LINE NARROWED EXCIMER LASER

A free running excimer laser with a stable resonator produces a spectral output with a relatively wide bandwidth. For example free running ArF has a bandwidth of approximately 500pm FWHM. The spectral output can be greatly narrowed by inserting wavelength dispersive optical elements into the laser cavity . The narrow band output can also be tuned over a region which is typically close to the free running bandwidth of the laser. With both ArF and KrF line widths of less than 1pm can be obtained. Narrow band excimer lasers exhibit exceptional coherence properties. For FBG applications, BraggMaster lasers which produce high spatial and high temporal coherence are recommended.

The EX50LN is available in  <1pm  and <10pm versions and a number of repetition rate models. with up to 10mJ of narrow band energy at 248nm and 5mJ at 193nm. Higher energy output is available from an oscillator amplifier line narrowed system which produces up to 100mJ of highly line narrowed 248nm output.

EX50LN

PARAMETER

F2

ArF

KrF

XeCl

XeF

Wavelength nm line center

157

193.3

248.35

308-311

351, 533

Energy Max. <1pm

 

2

4

2

2

Energy Max. <0.35pm

1 Line

0.75

2

 

 

Tuning Range pm

 

+/- 200

+/-200

N/A

Average Power 125Hz

0.30

.25

0.3

0.3

Average Power @250Hz

 

0.5/1

.5/1

0.50

0.5

Average Power @500Hz

1/2

1/2

1.0

Stability %

Call

<3%

Dynamic gas lifetime Pulses to 50% energy*

10E6

12E6

15E6

20E6

15E6

Shelf life Approx. to 50% energy

10 days

20 days

30 days

90 Days

30 Days

Pulse Length, ns

14-18

Beam Size, mm

 9 X 4

Divergence, mRad full angle

0.8 X 1.6

Tube Service 2-3 Billion Pulses
Window Service 200E6 >500E6 >500E6    

Cooling

Air/Water

Download Data Sheet .pdf format

Download Dimensional Drawing

    The Ex5ALN narrow mini line narrowed laser

 EX5ALN Specifications
PARAMETER ArF KrF
Wavelength, nm 193 248
Energy Max., mJ 5 15
Line width, pm typical 25 20
Spectral Line shape Gaussian
Tunability +/-200pm +/-200pm
Average Power @ 25Hz W 0.1 0.3
Average Power @ 250Hz W 1.0 2.5
Repetition Rate Max. Hz          25/250
Stabilty <3% 1 Sigma
Shelf life to 50% energy 3 days 10 days
Pulse Length nS 8       
Stability <3% One Sigma
Tube Service 1000 Million Pulses
Beam Size, mm 3X 6
Divergence, mRad full angle 1 X 2
Cooling AIR
Timing Jitter 2nS One Sigma
Weight 16kg