THE EX350 EXCIMER LASER
The EX350 is a high energy excimer laser producing up to 250mJ output energy at 248nm and 150mJ at 193nm. The laser is designed for applications requiring high pulse energy such as Pulsed Laser Deposition.
Key Benefits
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Available in 20Hz, 50Hz and 100Hz versions |
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High Energy in a single table top package |
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Low divergence beam |
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Computer controlled scientific instrument |
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Low Jitter <2nS standard deviation |
EX350 Specifications
PARAMETER |
F2 note 1 |
ArF |
KrF |
XeCl |
XeF |
Wavelength nm |
157 |
193 |
248 |
308 |
351 |
Energy Max. mJ |
20 |
150 |
300 |
125 |
100 |
Average Power 20Hz version |
|
3 |
5 |
3 |
2 |
Average Power 50Hz version |
|
5 |
10 |
6 |
4 |
Shelf life Approx. to 50% energy |
5 days |
20 days |
30 days |
6 months |
30 Days |
Pulse Length |
18-22 nS |
System lifetime |
Billions of pulses |
Beam Size |
19 X 7 mm |
Divergence |
3.0 X 1.2 mRad |
Stability |
<2% Standard Deviation |
Timing Jitter |
+/- 2nS |
Dimensions |
850 X 430 X 330 mm |
Cooling |
Air/ Water |
Electrical |
115/220 AC 20/10A |
Weight |
75kg |
Note 1 !57nm 10Hz only
The EX350A is a high energy, wide-discharge laser producing up to 1J output energy at 248nm and 308nm
EX350A Specifications
PARAMETER |
F2 |
ArF |
KrF |
XeCl |
XeF |
Wavelength nm |
157 |
193 |
248 |
308 |
351 |
Energy Max. mJ |
22 |
200 |
1000 |
1000 |
125 |
Average Power 20Hz version |
0.4 |
3.0 |
10.0 |
10.0 |
2.0 |
Average Power 50Hz version |
0.9 |
6 |
|
6 |
4 |
Shelf life Approx. to 50% energy |
10 days |
20 days |
30 days |
6 months |
30 Days |
Pulse Length |
18-22 nS |
Beam Size |
19 X 7 mm |
Divergence |
3.0 X 1.2 mRad |
Stability |
<2% Standard Deviation |
Timing Jitter |
+/- 2nS |
System Lifetime |
> I Billion pulses |
Dimensions |
1420 X 430 X 330 mm |
Cooling |
Air/ Water |
Weight |
80kg |
Download EX350 Data sheet .pdf format
Download EX350 Dimensional drawing
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