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THE EX350 EXCIMER LASER

    

     The EX350 is a high energy excimer laser producing up to 250mJ output energy at 248nm and 150mJ at 193nm.  The laser is designed for applications requiring high pulse energy such as Pulsed Laser Deposition.

Key Benefits

bullet Available in 20Hz, 50Hz and 100Hz versions
bullet High Energy in a single table top package
bullet Low divergence beam
bullet Computer controlled scientific instrument
bullet Low Jitter <2nS standard deviation

EX350 Specifications

PARAMETER F2 note 1 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 20 150 300 125 100
Average Power 20Hz version   3 5 3 2
Average Power 50Hz version   5 10 6 4
Shelf life Approx. to 50% energy   5  days 20 days 30 days 6  months 30 Days
Pulse Length 18-22 nS
System lifetime Billions of pulses
Beam Size 19 X 7 mm
Divergence 3.0 X 1.2 mRad
Stability <2% Standard Deviation
Timing Jitter +/- 2nS
Dimensions 850 X 430 X 330 mm
Cooling Air/ Water
Electrical  115/220 AC  20/10A
Weight 75kg

Note 1 !57nm 10Hz only

 

     The EX350A is a high energy, wide-discharge laser producing up to 1J output energy at 248nm and 308nm 

EX350A Specifications

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 22 200 1000 1000 125
Average Power 20Hz version 0.4 3.0 10.0 10.0 2.0
Average Power 50Hz version 0.9 6   6 4
Shelf life Approx. to 50% energy 10  days 20 days 30 days 6  months 30 Days
Pulse Length 18-22 nS
Beam Size 19 X 7 mm
Divergence 3.0 X 1.2 mRad
Stability <2% Standard Deviation
Timing Jitter +/- 2nS
System Lifetime > I Billion pulses
Dimensions 1420 X 430 X 330 mm
Cooling Air/ Water
Weight 80kg

      Download EX350 Data sheet .pdf format

      Download EX350 Dimensional drawing