THE EX350 EXCIMER LASER

    

     The EX350 is a high energy excimer laser producing up to 250mJ output energy at 248nm and 150mJ at 193nm.  The laser is designed for applications requiring high pulse energy such as Pulsed Laser Deposition.

Key Benefits

bulletAvailable in 20Hz and 50Hz versions
bulletHigh Energy in a single table top package
bulletLow divergence beam
bulletComputer controlled scientific instrument
bulletLow Jitter <2nS standard deviation

EX350 Specifications

PARAMETER F2 note 1 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 20 120 250 100 100
Average Power 20Hz version   2.0 5 2.5 2
Average Power 50Hz version   5 10 5 4
Shelf life Approx. to 50% energy 5 days 20 days 30 days 6 months 30 Days
Pulse Length

18-22 nS

Dynamic Gas lifetime    193nm/ 248nm 20 Million pulses
Beam Size

19 X 7 mm

Divergence

3.0 X 1.2 mRad

Stability

 <2% Standard Deviation

Timing Jitter

+/- 2nS

Dimensions

850 X 430 X 330 mm

Cooling                      Air/ Water
Electrical  115/220 AC  20/10A
Weight                             75kg

Note 1 !57nm 10Hz only

 

The EX350A High Enefgy laser

EX350A Specifications

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 22 200 350 175 125
Average Power 20Hz version 0.4 3.0 6.0 3.0 2.0
Average Power 50Hz version 0.9 6 12 6 4
Shelf life Approx. to 50% energy 10 days 20 days 30 days 6 months 30 Days
Pulse Length

18-22 nS

Beam Size

19 X 7 mm

Divergence

3.0 X 1.2 mRad

Stability

 <2% Standard Deviation

Timing Jitter

+/- 2nS

tube SERVICE 1-2 BbILLION PULSES
Dimensions

1420 X 430 X 330 mm

Cooling                      Air/ Water
Weight                             80kg

Download EX350 Data sheet .pdf format

Download EX350 Dimensional drawing