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EX100 EXCIMER LASER

 


EX100/125 Air cooled laser

        The EX100  excimer lasers are designed to provide high power industrial laser performance in a low cost, high reliability system. The unique linear design of GAM LASER products allows power scaling to be achieved at low incremental cost. The EX100 provides the first cost effective high power excimer laser. The EX100 gives repetition rates to 750Hz with all excimer gases and F2 at 157nm, lower repetition rate versions are also available. The laser gives up to 68W output power with KrF and 32W with ArF. Exceptional dynamic and static gas lifetime is obtained from the total metal/ceramic design and corona preionization system with over 30 million pulses to 50% energy on KrF and 12 weeks static gas lifetime. An industrial version gives longer gas lifetime. The laser is a total metal/ceramic device and uses the most advanced design of any commercial excimer laser.

Applications

bulletPulsed laser deposition
bulletIonization
bulletMicromachining

Key Benefits

bulletA powerful high repetition rate system in a compact package.
bulletLow divergence output
bulletExcellent pulse to pulse stability

NEW EX100 HIGH ENERGY EXCIMER LASER SPECIFICATIONS

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 10 75 125 65 60
Average Power 60Hz 0.5 4 6 3 3
Average Power @125Hz 1.0 8 12 6 6
Average Power @250Hz 2.0 16 24 13 10
Dynamic gas lifetime Pulses to 50% energy 10E6 15E6 20E6 20E6 20E6
Shelf life Approx. to 50% energy 15 days 60 days 90 days >6 Months 90 Days
Pulse Length, ns 15-22
Beam Size, mm  10 X 5
Stability <2% Standard Deviation
Tube Service  2 Billion Pulses
Divergence, mRad full angle  0.8 X 1.5
Cooling  Air/Water

Want more energy ? Try our new Improved EX350, giving up to 250mJ

      Download EX100 data sheet in .pdf format

      Download EX100 dimensionals in .pdf format

Click to enlarge

EX100 Stability at 125Hz, 70mJ with KrF. Standard deviation 0.86% in 5000 pulses, Max./Min. 67.9mJ/74.1 mJ.

* Maximum energy is approximately 20% lower for 1kHz lasers