EX100 EXCIMER LASER
The EX100 excimer lasers are designed to provide high power industrial laser performance in a low cost, high reliability system. The unique linear design of GAM LASER products allows power scaling to be achieved at low incremental cost. The EX100 provides the first cost effective high power excimer laser. The EX100 gives repetition rates to 750Hz with all excimer gases and F2 at 157nm, lower repetition rate versions are also available. The laser gives up to 68W output power with KrF and 32W with ArF. Exceptional dynamic and static gas lifetime is obtained from the total metal/ceramic design and corona preionization system with over 30 million pulses to 50% energy on KrF and 12 weeks static gas lifetime. An industrial version gives longer gas lifetime. The laser is a total metal/ceramic device and uses the most advanced design of any commercial excimer laser.
NEW EX100 HIGH ENERGY EXCIMER LASER SPECIFICATIONS
Needmore energy ? Try our new Improved EX350, giving up to 250mJ
Download EX100 data sheet in .pdf format
Download EX100 dimensionals in .pdf format
EX100 Stability at 125Hz, 70mJ with KrF. Standard deviation 0.86% in 5000 pulses, Max./Min. 67.9mJ/74.1 mJ.
* Maximum energy is approximately 20% lower for 1kHz lasers