Home Up News Information Request Technology OEM Lasers Line Narrowed Excimers Industrial Excimer Lasers CO2 Lasers Semiconductor Excimers Contact Employment  

                                        

 

 

 

EX10 AND EX10A EXCIMER LASERS 

For applications requiring high repetition rate and moderate average power, when you need a compact air cooled laser, the EX10 is the choice. The EX10 excimer laser offers state of the art performance in a compact package and provides a highly reliable, powerful source of ultraviolet radiation. Repetition rates of 250Hz and 500Hz in air cooled units, an average power of 12W with KrF at 248nm and 6.5W with ArF at 193nm give of operation between refills using XeCl. Ideal for applications in micromachining, tunable laser pumping, marking and mass spectrometry.

Turn Key Table Top System

The EX10 laser is total metal/ceramic device and uses an advanced linear design to produce high energy output in a compact package. The carefully chosen materials for laser construction give the EX10 static and dynamic gas lifetimes unmatched by any other excimer laser. The gas lifetime advantage is particularly noticeable with F2 at 157nm in the VUV where static gas lifetime is over 15 days compared to 1 day for most excimer lasers. A optimized F2 version the EX10F is recommended for dedicated 157nm operation.

The EX10 is designed for medical, scientific and industrial applications where long term service free operation is required. Software automatically maintains constant , highly stable (<2%), energy output using the standard internal energy monitor. The software also warns the user if maintenance is required. The laser can operate directly from a PC for remote programming and software upgrading. The EX10 of course includes standard features such as active thermal stabilization, constant power and energy control, external triggered operation, sync out, automatic refill and automatic gas control. The laser can be completely controlled from a Windows 9x or Windows NT software package

High Efficiency Discharge

High efficiency is the key to outstanding laser performance. The EX10 operates with up to 3 times the efficiency of similar mini excimer lasers. This means that only 1/3 of the energy input is required to achieve the same optical output. The optimized soft corona preionization state creates a uniform high efficiency discharge at repetition rates up to 1000Hz with a switching jitter of less than 2nS standard deviation. Additionally the increased efficiency greatly decreases the wasted energy deposited to the discharge and results in reduced EMI and much reduced electrode and component wear. This also increases total system lifetime and allows air cooled operation at the highest repetition rates.

The laser features active thermal stabilization. This allows long term operation of the laser with excellent pointing stability, better than 20 micro radians/C.

Key Benefits

bulletEasy to use all in one compact package
bulletInternal vacuum pump and Halogen filter
bulletComputer controlled
bulletHigh pulse to pulse stability
bulletUltra long gas lifetime
bulletThe latest total metal/ceramic technology
bulletHigh stability corona preionization
bullet1 Billion pulse optics service
bullet70mJ/100Hz TEA CO2 Version

 

PARAMETER

ArF

KrF

XeCl

XeF

Wavelength nm

193

248

308

351

Energy Max. mJ

20

35

15

10

Energy Control Range mJ

5-20

10-35

7-15

4-10

Max. Stabilized Energy 250Hz W

15

25

10

6

Average power Max.  250

3

5

3

1.5

Average Power  500Hz W

6

10

6

3

Repetition Rate Hz

            250/500

Dynamic gas lifetime to 50% energy

20E6

35E6

20E6

20E6

Static Gas Life to 50% energy

30 days

60 days

>6 months

60 days

Pulse Length, ns

               11-15

Beam Size , mm

                 8 X 3-4

Divergence, mRad full angle

                1 X 2

Stability

    <2% Standard Deviation

Optics Service

300E6

1000E6

100E6

300E6

Timing Jitter

     2nS Standard Deviation

Tube Service

          2-3 Billion Pulses

Cooling Air/water

 

 

 

 

The EX10A is a high power mini excimer laser

EX10A MINI LASER

PARAMETER

F2

ArF

KrF

XeCl

XeF

Wavelength nm

157

193

248

308

351

Energy Max. mJ

2.5

18

24

10

10

Average Power 500Hz 0.8 7 10 4 4

Average Power  1000HZ

 

14

18

      8

      8

Repetition Rate Hz

          500/1000

Dynamic gas lifetime to 50% energy

1E6

15E6

20E6

20E6

15E6

Static Gas Life to 50% energy

5

30 days

60 days

60 Days

30 days

Pulse Length ns

               8-12

Beam Size , mm

               6 X 3

Divergence mRad full angle

                1 X 2

Stability

    <3% Standard Deviation

Optics Service

       1 Billion

Timing Jitter

     2nS Standard Deviation

Tube Service  

  25-3,5  Billionpulses

Cooling Air
AC INPUT 115/220 VAC  4/8A
Weight 20kg
DIMENSIONS 61 X 20X 20

 

Download EX10 data sheet in .pdf

 Download EX10 Dimensional drawings

 Download EX10 Beam Profile

 

Pulse to Pulse stability. Click graph for larger view

Click here for the Industrial version of the EX10