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157nm F2 LASERS

 

EX10F 157nm F2 laser

F-version lasers give the longest available gas lifetime at 157nm, with up to 15 days operation on a single gas fill. F-version lasers also operate on all other excimer laser wavelengths but at lower energy than standard lasers. All F-version laser are fitted with an external optics coupling for connection to a  Nitrogen or inert gas purge system. F2 Lasers operate with HELIUM buffer gas for reduced running costs compared with systems using NEON buffer.

Key Benefits

bulletThe longest lifetime commercially available 157nm lasers
bulletVacuum Ultraviolet in a table top package
bulletVUV purge connector

 

LASER MODEL EX10F EX50F EX100F EX100HF
Wavelength nm 157
Energy Max. mJ 3.0 4.5 10 15
Average Power W 0.6 @ 300 Hz .8 @ 250 Hz 1.1 @ 125 Hz 0.8W@60Hz
Average Power W 1.2 @ 600 Hz 1.6 @ 500 Hz 2.2 @ 250 Hz 1.6W @125Hz
Max. Average power  W 1.9 @ 750Hz 2.8 @ 750Hz 4W @500Hz 3W @ 250Hz
Repetition Rate Hz 300/600/750 250/500/750 125/250/500 60/125/250
Dynamic gas lifetime Pulses to 50% energy 15E6 15E6 >15E6  8E6
Shelf life Approx. to 50% energy 15 Days 15 Days 15 Days 15 Days
Pulse Length nS 7 10
Beam Size, mm    7.5 X 3 9 X 3 11 X 6
Stability  <3% Standard Deviation
Divergence, mRad full angle 1 X 2 0.9 X 1.8   0.8 X 1.6
Cooling Air 250/300/600 Hz /Water 500/750
Tube Service 2 Billion Pulses
Window Service

 > 500 Million pulses

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